A rugged, high precision capacitance diaphragm low pressure gauge for cryogenic use.

In order to carry out precise laboratory measurements of infrared absorption intensities, line profiles of molecules and organic volatile compounds for atmospheric chemistry in planetary and upper earth atmospheric layers, precise gas pressure measurement between 10(-3) and a few mbars in the 77-300 K temperature range is necessary. A prototype, rugged, precision capacitive pressure gauge for cryogenic use has been designed, built at SOLEIL and tested down to 77 K. The design includes corrosion-resistant materials and has been tailored to operate on a differential measurement scheme based on a simple, precision capacitance-to-digital converter chip, instead of high precision floating capacitive bridges, as are used in other designs. The designs conception and performance specifications are presented here, illustrated by a precision of better than 1% in the 0.2-40 mbar range, with a resolution of 2 × 10(-3) mbar. The gauge is tunable and can be adjusted for higher precision and a better resolution, at the expense of the maximum high-pressure range.