A simple microfluidic Coriolis effect flowmeter for operation at high pressure and high temperature.

We describe a microfluidic Coriolis effect flowmeter that is simple to assemble, operates at elevated temperature and pressure, and can be operated with a lock-in amplifier. The sensor has a flow rate sensitivity greater than 2° of phase shift per 1 g/min of mass flow and is benchmarked with flow rates ranging from 0.05 to 2.0 g/min. The internal volume is 15 μl and uses off-the-shelf optical components to measure the tube motion. We demonstrate that fluid density can be calculated from the frequency of the resonating element with proper calibration.