High-performance droplet-triggered laser shooting control and test system for laser-produced plasma extreme ultraviolet light source.

We report on the development and experimental validation of the droplet-triggered laser shooting control and test system for achieving precise spatiotemporal synchronization between tin droplets and laser pulses in laser-produced plasma extreme ultraviolet (LPP-EUV) light sources. The system utilizes real-time tin droplet triggering to generate synchronized, adjustable delay trigger signals for laser pulses, enabling highly accurate interaction between the droplet and the laser pulse at the target space. The synchronization control performance of the system was demonstrated on a custom-built LPP-EUV test platform. Key achievements include sub-nanosecond timing resolution for trigger signals, and precise delay control, enabling stable operation at shooting repetition rates of 25 kHz. The system also achieves 10 kHz droplet image acquisition and sub-micrometer droplet position calculation accuracy. These capabilities enable reliable evaluation of shooting control performance. Experimental results demonstrate a simulated shooting accuracy of 3.29 μm (3σ) in the target space, representing an 18.2× improvement over non-target space. Working together with a high-power drive laser, this system is suitable for deployment in actual LPP-EUV light sources.