Design of Active Vibration Isolation Controller with Disturbance Observer-Based Linear Quadratic Regulator for Optical Reference Cavities.

The optical reference cavity in an ultrastable laser is sensitive to vibrations; the microvibrations in a space platform affect the accuracy and stability of such lasers. In this study, an active vibration isolation controller is proposed to reduce the effect of vibrations on variations in the cavity length and improve the frequency stability of ultrastable lasers. Based on the decentralized control strategy, we designed a state-differential feedback controller with a linear quadratic regulator (LQR) and added a disturbance observer (DOB) to estimate the source noise. Experiments were conducted using an active vibration isolation system; the results verified the feasibility and performance of the designed controller. The accelerations along the axis (Z-, X-, Y-) directions were suppressed in the low-frequency band within 200 Hz, and the root-cumulative power spectral densities (PSDs) declined to 1.17 × 10-5, 7.16 × 10-6, and 8.76 × 10-6 g. This comprehensive vibration met the requirements of an ultrastable laser.