[Microcosmic analysis of amino group implanted titanium].

OBJECTIVE

The purpose of this study was to determine the effects of amino group implantation on the surface structures of titanium.

METHODS

The amino groups were implanted into the surfaces of titanium using 100 keV amino group ions at ambient temperature (25 degrees C) with the following three different doses: 5 x 10(17), 1 x 10(17) and 5 x 10(16) ions per cm2. The current density of the ion-beam was (10 microA/cm2. The modified surfaces were characterized using X-ray photoelectron spectroscopy (XPS) to determine the chemical components of the modified surfaces. A scanning electron microscope (SEM) was used to study the physical structure of the surfaces.

RESULTS

The wide XPS profiles, the binding energy data and the SEM photos were obtained. The XPS showed that the modified surface contained Ti, O, C and N. The possible chemical states were speculated using Gauss matching analysis. There was no significant difference between the surfaces with and without implanted amino groups.

CONCLUSION

The XPS data reveals that the structure of the modified surface layer of aminogroup-implanted titanium is TiN, comprising a complex structure of titanium and amino compound near the surface. The SEM Photos show that this technique has little effect on the surface structures of materials.