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DOI 10.1063/5.0043002

Медицинская библиотека · The Review of scientific instruments · 2021

In situ microscopy for plasma erosion of complex surfaces.

Ottaviano Angelica, Thuppul Anirudh, Hayes John, Dodson Chris, Li Gary Z, Chen Zhitong, Wirz Richard E

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Аннотация

A novel method for the in situ visualization and profilometry of a plasma-facing surface is demonstrated using a long-distance microscope. The technique provides valuable in situ monitoring of the microscopic temporal and morphological evolution of a material surface subject to plasma-surface interactions, such as ion-induced sputter erosion. Focus variation of image stacks enables height surface profilometry, which allows a depth of field beyond the limits associated with high magnification. As a demonstration of this capability, the erosion of a volumetrically featured aluminum foam is quantified during ion-bombardment in a low-temperature argon plasma where the electron temperature is ∼7 eV and the plasma is biased relative to the target surface such that ions impinge at ∼300 eV. Three-dimensional height maps are reconstructed from the images captured with a long-distance microscope with an x-y resolution of 3 × 3 μm2 and a focus-variation resolution based on the motor step-size of 20 μm. The time-resolved height maps show a total surface recession of 730 μm and significant ligament thinning over the course of 330 min of plasma exposure. This technique can be used for developing plasma-facing components for a wide range of plasma devices for applications such as propulsion, manufacturing, hypersonics, and fusion.

Для цитирования: Ottaviano Angelica, Thuppul Anirudh, Hayes John, Dodson Chris, Li Gary Z, Chen Zhitong, Wirz Richard E. In situ microscopy for plasma erosion of complex surfaces.. The Review of scientific instruments. 2021. DOI: 10.1063/5.0043002.
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