Ten-Year Survival With a Continuous-Flow Left Ventricular Assist Device and Aortic Valve Closure.

Based on gray-tone optical lithography technology combined with the overlay alignment method, a spherical concave micro-mirror is fabricated at the end of a rectangular optical waveguide (ROW) for low vertical coupling loss. The optimal structures of the spherical concave micro-mirrors were designed through ray-tracing simulation. The results indicate that the minimal vertical coupling loss is only 1.02 dB for the ROW core size of 20 μm × 20 μm. The surface roughness of the micro-mirror is considered, and it should be less than 106 nm to ensure that the vertical coupling loss is less than 1.5 dB. The radius of the fabricated spherical concave micro-mirror was measured as 263.3 μm and the surface roughness of the micro-mirror is 29.19 nm. The vertical coupling loss induced by the micro-mirror was measured as 1.39 dB. 1-dB tolerances in the direction of x-, y-, and z-axes are calculated to be ± 6.9 μm, ± 6.3 μm, and 46.2 μm, respectively.