Low-Cost and Paper-Based Micro-Electromechanical Systems Sensor for the Vibration Monitoring of Shield Cutters.

Vibration sensors are widely used in many fields like industry, agriculture, military, medicine, environment, etc. However, due to the speedy upgrading, most sensors composed of rigid or even toxic materials cause pollution to the environment and give rise to an increased amount of electronic waste. To meet the requirement of green electronics, biodegradable materials are advocated to be used to develop vibration sensors. Herein, a vibration sensor is reported based on a strategy of pencil-drawing graphite on paper. Specifically, a repeated pencil-drawing process is carried out on paper with a zigzag-shaped framework and parallel microgrooves, to form a graphite coating, thus serving as a functional conductive layer for electromechanical signal conversion. To enhance the sensor's sensitivity to vibration, a mass is loaded in the center of the paper, so that higher oscillation amplitude could happen under vibrational excitation. In so doing, the paper-based sensor can respond to vibrations with a wide frequency range from 5 Hz to 1 kHz, and vibrations with a maximum acceleration of 10 g. The results demonstrate that the sensor can not only be utilized for monitoring vibrations generated by the knuckle-knocking of plastic plates or objects falling down but also can be used to detect vibration in areas such as the shield cut head to assess the working conditions of machinery. The paper-based MEMS vibration sensor exhibits merits like easy fabrication, low cost, and being environmentally friendly, which indicates its great application potential in vibration monitoring fields.