High-Yield ReS2 Photodetector Array Enabled by Dry-Released Self-Rolled-Up Microtubes and Enhanced through Scalable MoS2 QDs.

Three-dimensional (3D) self-rolled-up microarchitectures present a promising avenue to enhance the performance of low-dimensional material-based optoelectronic devices. However, the high-quality, high-yield, and scalable fabrication of these microarchitectures remain challenging. Herein, we demonstrate a 16 × 21 high-yield (∼98%) photodetector array of 3D ReS2 self-rolled-up microtubes fabricated via a XeF2 dry-released process on a silicon on insulator substrate (1.5 cm × 1.5 cm). The 3D configuration enhances optical confinement and light absorption, leading to a photocurrent increase of 2 orders of magnitude compared to its planar counterpart. Furthermore, a mixed-dimensional heterojunction formed by integrating MoS2 quantum dots (QDs) onto ReS2 results in more than 3-fold and 2-fold improvements in photocurrent and responsivity (R), respectively. The devices also exhibit fast responses (4 ms/6 ms), along with excellent stability and robustness. The finite element simulation and energy band analysis reveal that the architecture synergistically combines the optical localization of 3D geometry, the efficient charge transport of two-dimensional (2D) material, and the strong absorption and band-structure tunability of zero-dimensional (0D) QDs. This study not only demonstrates the unique advantages of XeF2 dry release in the fabrication of large-scale and high-yield photodetector arrays based on 3D microtube structures for low-dimensional materials but also provides design inspiration for the development of next-generation photodetectors through optical structure design and multidimensional material integration.