High-throughput super-resolution imaging chip based on miniaturized full-frequency encoded-illumination.

Super-resolution microscopy has become an indispensable core research tool in biology, materials science and medicine, yet existing technologies face an inherent bottleneck where resolution, large field of view (FOV), label-free compatibility and system cost cannot be simultaneously optimized. A miniaturized full-frequency encoded illumination (mini-FEI) chip is presented for high-throughput super-resolution imaging using the spatial frequency shift (SFS) effect. We propose a tunable continuous SFS method for across far-field and near-field illumination modulation, which is achieved through propagating and evanescent waves. The multi-illumination modes are precisely and flexibly modulated by an encoded LED array. The light travels to the sample via a set of prisms, producing super-resolution images with high signal-to-noise ratio (SNR). Mini-FEI super-resolution imaging reaches a resolution of 333 nm ( ~ λ/4NA), while maintaining a large FOV of ~1 mm2. The method is validated on label-free samples including USAF Target, Star Target, onion root tip cells, and live COS7 cells, all of which could be successfully reconstructed. Through the introduction of integrated LED arrays for evanescent wave excitation, expensive laser systems can be avoided and the system significantly miniaturized. The mini-FEI super-resolution imaging chip is simple and cost-effective to fabricate, is compatible with commercial microscopes, and thus holds great potential for widespread deployment in scientific and industrial research.