Continuous metasurface-integrated GaN-based micro-LEDs for naked-eye 3D display.

To address the large divergence angle, weak spatial coherence, and severe optical crosstalk of conventional GaN-based micro-LEDs, together with the narrow viewing zone and resolution loss in current naked-eye 3D displays, this work presents a vertically integrated structure of a continuous metasurface-integrated micro-RCLED. A Fabry-Perot resonant cavity is constructed with a top DBR and a bottom composite reflector consisting of an Al layer, a SiO2 spacer, and a DBR for beam collimation, while a continuous metasurface array enables seamless 0 to 2π phase modulation. Simulations show that the emitted light converges to an extremely narrow angular range with greatly improved coherence. At 465 nm, deflection efficiencies of 70.5%, 54.8%, 43.6%, and 32.7% are achieved at 10°, 20°, 30°, and 40°, along with dual-angle deflection capability. Featuring a simple configuration and easy micro-nano fabrication, this design offers an efficient solution for high-performance naked-eye 3D displays and multifunctional light-modulated optoelectronic devices.