Nature communications · 2026
Wafer-scale conformal metasurface optics.
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Martin-Monier Louis, Chang Sehui, Fröch Johannes E, Li Zhaoyi, Ranno Luigi, Dao Khoi Phuong, Ueno Akira, Sia Jia Xu Brian, Zheng Hanyu, Burns Padraic, Gu Tian, Song Young Min, Majumdar Arka, Hu Juejun
Аннотация
Curved and conformal optics provide additional geometric degrees of freedom that enable enhanced optical performance while satisfying non-optical constraints such as ergonomics, aerodynamics, and wearability. However, existing fabrication approaches for curved metasurfaces are limited in scalability, geometry control, and alignment accuracy. Here we show a scalable fabrication strategy for curved and conformal metasurface optics based on thermoforming, an industry-standard manufacturing process for thermoplastics. Our approach enables wafer-scale production of highly curved metasurfaces with millimeter-level radii of curvature and micron-level alignment precision. We develop a predictive thermorheological model that accurately captures and compensates for the large deformations induced during thermoforming, preserving the intended optical response and enabling diffraction-limited performance. As demonstrations, we realize freestanding curved metalenses, conformal refractive-metasurface hybrid optics, and an artificial compound eye with a wide field of view, reduced aberrations, and uniform imaging performance. These results establish thermoforming as a scalable manufacturing platform for next-generation conformal photonic systems.